Vacuum Pumps SST Turbomolecular Pumps

For generating high and ultra-high vacuums.
SST turbomolecular pumps are equipped with an integrated low vacuum stage.
Dry, solid-lubricated hybrid bearings with ceramic balls prevent the vacuum
being contaminated by oils, greases or their decomposition products.
SST Turbomolecular Pumps cover pumping speeds of 80, 300 and 500 l x s-1.

Applications:
- for the high and ultra high vacuum ranges
- analysis technology
- electron microscopy
- surface analysis
- semiconductor industry with sputtering processes, etching
- research
- leak detection
- production of optical layers

Special characteristics:
- Monobloc rotors with extremely low residual vibrations
- Special blade design for a high pumping speed and a high compression ratio,
particularly for light gases
- The gap-free rotor structure gives fast degassing on the high vacuum side
- Fore-vacuum limiting pressure up to several mbars
- Oil free, so no self-generation of light gases from hydrocarbon cracking
products
- Any operating position
- Very quiet running, minimal noise level
- Maintenance free under normal operation
- Small dimensions, low weight
- optional air or water cooling

Note:
Ultimate pressure statements and determination of the ultimate pressure
according to DIN 28428:
Pressure achieved in the defined measuring dome after 48 hours and 24 hours
baking of the measuring arrangement. The high vacuum flange (suction flange)
of the turbomolecular pump is metal-sealed, that is it is designed as a
ConFlat (CF) flange.


Scope of delivery:
SST Turbomolecular Pump complete ready-to-use with controller included 3 m
cable, splinter screen and ventilator.

Turbo-Individual Components, see Vacuum Devices Accessoieres for
Turbomolecular pumps.